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The Series 61 HV Control Butterfly Valves offer exceptional pressure regulation and are ideal for fine-tuning in CVD and ALD processes. With their fast and precise motion controllers (0.1 s) and the disc acting as a throttling element, they adjust the conductance of the valve opening to quickly achieve the set pressure. The integrated pressure controller calculates the required disc position for optimal pressure regulation.

Specifically designed for harsh downstream processes with potential particles in the gas flow, the 61 series remains fully operational even with high particle loads and deposits. Proven in thousands of demanding applications under various process conditions, the 61 series delivers outstanding reliability.

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Reihe 61 Klappenventil

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