PSG50x

Pirani gauges

The INFICON Pirani standard gauges PSG500, PSG502-S, PSG510-S, and PSG512-S are equipped with the most advanced Pirani digital technology available on the market. The robust stainless steel sensor cell and compact design make them ideal for use in semiconductor systems and for standard applications such as foreline vacuum measurement.

Product specifications

Product specifications

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PSG50X

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