SKY® CDG100D
Capacitance manometers
INFICON SKY CDG100D manometers are the top choice for precise total pressure measurement and control.
CDG100D gauges are temperature-controlled at 100°C for enhanced performance in demanding semiconductor and plasma processes. They are available for full-scale ranges from 100 mTorr to 1000 Torr, with all common flange types and fieldbus interfaces, delivering a linear, gas-type independent pressure signal from 0 to 10 V. INFICON capacitance manometers use an ultra-pure, corrosion-resistant alumina ceramic diaphragm.
The ceramic sensor’s advantages include improved signal stability, faster recovery from atmospheric pressure, short warm-up time, and an exceptionally long service life. INFICON CDGs are high-quality, cost-effective pressure sensors for demanding semiconductor, plasma, and vacuum applications.